Laser/E-Beam Photomasks
2 Core 2564 Laser Writers
- 7”x7”x .250” Maximum plate size
- 6.4”x 6.4” Maximum write area
- .025um addressable resolution
- .8um feature size
- .05um overlay
1 Mebes III E-Beam
- 7”x7”x .250” Maximum plate size
- 6.2”x 6.2” Maximum write area
- .020um addressable resolution
- 0.60um feature size
- .1um overlay
1 ALTA 3900
- 9”x9”x .250” Maximum plate size
- 8.3”x 8.3” Maximum write area
- .005um addressable resolution
- 0.60um feature size
- .060um overlay