Large Area Photomasks

MICRONIC MP80+ LARGE-AREA MASK WRITER

  • 32″ x 32″ Plate Size
  • 1 micron minimum feature size
  • H & E-Line capabilities
  • Accepts GDSII, DXF, Gerber, MANN, MEBES, E-Mask, DWG, Postscript

 

MICRONIC LRS-600 LARGE-AREA MASK WRITER

  • 24″ x 24″ Plate Size
  • 6 micron minimum feature size
  • H & E-Line capabilities
  • Accepts GDSII, DXF, Gerber, MANN, MEBES, E-Mask, DWG, Postscript

 

2 LARGE-AREA IMAGE REPEATING SYSTEMS

  • 4″x 4″ to 24″x 24″Plate Size
  • 4.5″x 4.5″ Maximum Die Size
  • 18″x 18″ Stepping Area
  • 1X Projection System
  • 10 um Minimum Feature Size
  • H-Line Capability